平成15年度　

→発表　　　→学術論文　　　→プロシーディングス等

学術論文　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　トップ　| 　ホーム

1)「レーザー生成プラズマを用いた次世代リソグラフィEUV光源」
西原功修、西村博明、望月孝晏、佐々木明
レーザー研究　第32巻第5号, pp.330-336

2) Side-on measurement of hydrodynamics of laser-driven plasmas with high space- and time-resolution x-ray imaging technique
S. Fujioka, H. Shiraga, M. Nishikino, Y. Tamari, K. Shigemori, M. Nakai, H. Azechi, K. A. Tanaka, T. Yamanaka
Review of Scientific Instruments, Vol. 74, pp. 2198-2201 (2003)

3) First observation of density profiles in directly laser-driven polystyrene targets for ablative Rayleigh-Taylor instability research
S. Fujioka, H. Shiraga, M. Nishikino, K. Shigemori, A. Sunahara, M. Nakai, H. Azechi, K. Nishihara, T. Yamanaka
Physics of Plasma, Vol. 10, pp. 4784 - 4789 (2003)

4)「レーザー生成球対称Snプラズマからの極端紫外線(EUV)放射」
西村博明、重森啓介、中井光男、藤岡慎介、島田義則、橋本和久、山浦道照、内田成明、松井亮二、日比野隆宏、奥野智晴、陶　業争、長井圭治、乗松孝好、長友英夫、V. Zhakhovicks、古河裕之、砂原　淳、河村　徹、西川　亘、村上匡且、西原功修、宮永憲明、中塚正大、井澤靖和,
プラズマ・核融合学会誌, vol.80-04, pp.325-330, (2004)

5) Theoretical analysis of EUV emission from high density Xe plasmas
A. Sasaki, K. Nishihara, M. Murakami, F. Koike, T. Kagawa, T. Nishikawa, K. Fujima, T. Kawamura, H. Furukawa, Appl. Phys. Lett. submitted.

6) Theoretical EUV Spectrum of Near Pd-like Xe
A. Sasaki, J. Plasma Fusion Res. 79, 315 (2003).

7) Emission Characteristics of Extreme Ultraviolet Radiation from CO2 Laser-Produced Xenon Plasma
H. Tanaka, K. Akinaga, A. Takahashi, T. Okada
Jpn. J. Appl. Phys. 43, L585 (2004).

8) Development of a target for laser-produced plasma EUV light source using Sn nano-particles
H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada
Appl. Phys. A (2004) to be published.

9) Ion generation in a low-density plastic foam by interaction with intense femtosecond laser pulses
S. Okihara, T. Zh. Esirkepov, K. Nagai, S. Shimizu, F. Sato, M. Hashida, T. Iida,
K. Nishihara, T. Norimatsu, Y. Izawa, and S. Sakabe
Phyo.Rev. E 69, 026401(2004)

10)Monochromatic imaging and angular distribution measurement of extreme ultraviolet light from laser-produced Sn and Sn02 plasmas
Y. Tao, F. Sohbatzadeh, H. Nishimura, R. Matsui, T. Hibino, T. Okuno, S. Fujioka, K. Nagai, T. Norimatsu, K. Nishihara, N. Miyanaga, Y. Izawa, A. Sunahara and T. Kawamura
Accepted for publication in Appl. Phys. Lett.

11)Characterization of EUV emission from laser produced spherical plasma generated with multiple laser beams
Y. Shimada, H. Nishimura, M. Nakai, K. Hashimoto, M. Yamaura, Y. Tao, K. Shigemori, T. Okuno, K. Nishihara, T. Kawamura, A. Sunahara, S. Fujioka, S. Uchida, N. Miyanaga, Y. Izawa and C. Yamanaka
Submitted to Appl. Phys. Lett.

12)Temporal resolved x-ray penumbral imaging technique using heuristic image reconstruction procedure and wide dynamic range x-ray streak camera
S. Fujioka, H. Shiraga, H. Azechi, H. Nishimura, Y. Izawa, S. Nozaki, and Y-W. Chen
Accepted for publication in Rev. Sci. Instrum.

プロシーディングス等　　　　　　　　　　　　　　　　　　　　　　　　トップ　| 　ホーム

1) Characteristics of extreme ultraviolet radiation from cryogenic rare gas targets
Chirag Rajyaguru, Takeshi Higashiguchi, Takahiro Hirata, Masato Koga, Wataru Sasaki, and Shoichi Kubodera
2003 IEEE/LEOS Annual Meeting Conference Proceedings (16th Annual Meeting of the IEEE Lasers and Electro-Optics Society), Vol. 1, pp. 223-224 (2003).

2) Progress in Understanding of Laser-Produced Plasmas for EUV Source
N. Miyanaga, K. Fujima, S. Fujioka, Y. Fujimoto, H. Fujita, H. Furukwa, K. Hashimoto, T. Hibino, T.Kagawa, T. Kato, T. Kawamura, F. Koike, R. Matsui, R. More, M. Murakami, K. Nagai, M. Nakai, M. Nakatsuka, T. Nishikawa, K. Nishihaa, H. Nishimura, T. Norimatsu, T. Okuno, A. Sasaki, K.Shigemori, Y. Shimada, F. L. Sohnatzdeh, A. Sunahara, H. Tanuma, Y. Tao, K. Tsubakimoto, S.Uchida, M. Yamaura, H. Yoshida, V. Zhakhovskii, and Y.Izawa
IEEE Lasers and Electro-Optics Society), Vol. 1, pp.297-298.

3) Output energy and conversion efficiency of extreme ultraviolet radiation from rare gas cryogenic targets
Takeshi Higashiguchi, Takahiro Hirata, Masato Koga, Chirag Rajyaguru, Wataru Sasaki, and Shoichi Kubodera
Proceedings of SPIE, Vol. 5196, pp. 86-96 (2004).

4) Experimental study on basic properties of laser-produced EUV plasmas on GEKKO-XII laser facility
K. Shigemori, M. Nakai, Y. Shimada, M. Yamaura, K. Hashimoto, S. Fujioka,
H. Nishimura, S. Uchida, A. Sunahara, K. Nishihara, N. Miyanaga, and Y. Izawa
Proceedings of SPIE, to be published

5) Estimation of emission efficiency for laser-produced EUV-plasmas.
T. Kawamura, A. Sunahara, K. Gamada, H. Furukawa et.al.,
Proceedings of SPIE, to be published

6) EUV Emission of Tin Type Target with varying Laser Pulse Conditions,
Y. Shimada et al.,
Proceedings of SPIE, to be published

7) Theoretical simulation of extreme UV radiation source for lithography
K. Fujima, K. Nishihara, T. Kawamura, H. Furukawa, T. Kagawa, F. Koike,
R. More,; M. Murakaki, T. Nishikawa, A. Sasaki, A. Sunahara, V. Zhakhovskii,
T. Fujimoto, H. Tanuma
Proceedings of SPIE, to be published

8) Development of EUV Light Source by CO2 Laser-produced Plasma
H. Tanaka, K. Akinaga, A. Takahashi, and T. Okada
Appl. Phys. A(2004) to be published